Micromachining of 10 μM Al–0.5 wt% Cu Films Achieved through Porous Anodization Technique with Reduced Undercutting

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ژورنال

عنوان ژورنال: MRS Bulletin

سال: 2006

ISSN: 0883-7694,1938-1425

DOI: 10.1557/mrs2006.171